Aberration Correction System Using Segmented Detector in STEM
نویسندگان
چکیده
منابع مشابه
Aberration-Corrected Four-Detector STEM-EDS Analysis of Embedded Nanoclusters
Examining small particles embedded in a specimen foil is a challenging application for analytical STEM methods. When the particles are ~2 nm or smaller and the foils must be prepared by FIB (which results in thicker foils and more surface damage), the challenges increase. Here we report the use of aberrationcorrected STEM, equipped with high-detection-efficiency EDS systems, and multivariate st...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2015
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927615002500